特征★三軸花崗石結(jié)構(gòu)氣浮導(dǎo)軌、Z軸氣動平衡★粘貼式三軸光柵標尺★三軸聯(lián)動矢量運行(可匹配手動)技術(shù)規(guī)格型號X(mm)Y(mm)Z(mm)11120.5-0.4-0.35004003001-0.6-0.410006004001.5-1-0.8150010008002-1-0.8200010008002.5-1.5-12500150010003-2-1300020001000精度等級:A、B、C三級精度等級單軸精度(um)空間精度(um)R11自到A1.5+2L/10002.5+3.5L/10005B3+4L/10005+6L/10008